Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs
Wang, Peng, Liu, YaBing, Wang, Donglin, Liu, Huan, Liu, Weiguo, Xie, HuiKaiVolume:
10
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi10100693
Date:
October, 2019
File:
PDF, 2.14 MB
english, 2019