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Silver Damascene Process with Cap Layer
Ota, Masahiro, Tsujimura, Manabu, Inoue, Hiroaki, Ezawa, Hirokazu, Miyata, MasahiroVolume:
732
Year:
2002
Journal:
MRS Proceedings
DOI:
10.1557/PROC-732-I3.1
File:
PDF, 1.82 MB
2002