Features of the synthesis of lithium-based ternary oxide nanofilms by atomic layer deposition with LHMDS for thin-film LIBs
Maximov, Maxim Yu., Koshtyal, Yury, Mitrofanov, Ilya, Ezhov, Ilya, Rumyantsev, Aleksander, Popovich, AnatolyLanguage:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2019.10.107
Date:
November, 2019
File:
PDF, 1.98 MB
english, 2019