Ultrathin ZrO x...

ACS Applied Materials & Interfaces 2019 / 11

Ultrathin ZrO x -Organic Hybrid Dielectric (EOT 3.2 nm) via Initiated Chemical Vapor Deposition for High-Performance Flexible Electronics

Kim, Min Ju, Pak, Kwanyong, Choi, Junhwan, Lee, Tae In, Hwang, Wan Sik, Im, Sung Gap, Cho, Byung Jin
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.9b15363
Date:
November, 2019
File:
PDF, 3.20 MB
english, 2019
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