Electromigration Activation Energies in Alternative Metal...

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IEEE Transactions on Electron Devices 2019

Electromigration Activation Energies in Alternative Metal Interconnects

Beyne, Sofie, Pedreira, Olalla Varela, Oprins, Herman, De Wolf, Ingrid, Tokei, Zsolt, Croes, Kristof
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Year:
2019
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2019.2949196
File:
PDF, 1.75 MB
english, 2019
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