A Piezoelectric Stick-Slip Nanopositioning Stage With Ultra-High Load Capacity Realizing by Decoupling the Driving and Moving Units
Yu, Yang, Gao, Qiang, Zhang, Xiaosong, Qiao, Guangda, Han, Yi, Lu, Xiaohui, Cheng, TinghaiVolume:
7
Year:
2019
Journal:
IEEE Access
DOI:
10.1109/access.2019.2944840
File:
PDF, 4.62 MB
2019