Defect Structure of GaAs Layers Implanted with Nitrogen...

Technical Physics Letters 2018 / 9 Vol. 44; Iss. 9

Defect Structure of GaAs Layers Implanted with Nitrogen Ions

Sobolev, N. A., Kalyadin, A. E., Karabeshkin, K. V., Kyutt, R. N., Mikushkin, V. M., Shek, E. I., Sherstnev, E. V., Vdovin, V. I.
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Volume:
44
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785018090298
Date:
September, 2018
File:
PDF, 562 KB
2018
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