[Advanced Micro and Nanosystems] Reliability of MEMS || Eco Scan MEMS Resonant Mirror
Tabata, Osamu, Tsuchiya, ToshiyukiVolume:
10.1002/97
Year:
2007
Language:
english
DOI:
10.1002/9783527622139.ch10
File:
PDF, 529 KB
english, 2007