Crack propagation of Si nanofilm accompanied by initial stage of wet oxidation
Sun, Yu, Zhai, Zhi, Qiao, Baijie, Tian, Shaohua, Chen, XuefengLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.144200
Date:
October, 2019
File:
PDF, 6.54 MB
english, 2019