[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Ultra-Shallow P[sup +]∕N Junction Formation in Si Using Low Temperature Solid Phase Epitaxy Assisted with Laser Activation
Hara, Shuhei, Tanaka, Yuki, Fukaya, Takumi, Matsumoto, Satoru, Suzuki, Toshiharu, Fuse, Genshu, Kudo, Toshio, Sakuragi, Susumu, Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, YevgenYear:
2008
Language:
english
DOI:
10.1063/1.3033688
File:
PDF, 1.45 MB
english, 2008