Direct ion content measurements in a non-sputtering...

Journal of Instrumentation 2019 / 09 Vol. 14; Iss. 9

Direct ion content measurements in a non-sputtering magnetron discharge

Kaziev, A.V., Kolodko, D.V., Ageychenkov, D.G., Tumarkin, A.V., Kharkov, M.M., Stepanova, T.V.
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Volume:
14
Language:
english
Journal:
Journal of Instrumentation
DOI:
10.1088/1748-0221/14/09/C09004
Date:
September, 2019
File:
PDF, 8.61 MB
english, 2019
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