Oxygen Gettering Cap to Scavenge Parasitic Oxide Interlayer...

IEEE Electron Device Letters 2019 / 11 Vol. 40; Iss. 11

Oxygen Gettering Cap to Scavenge Parasitic Oxide Interlayer in TiSi Contacts

Yu, Hao, Schaekers, Marc, Wang, Lin-Lin, Everaert, Jean-Luc, Jiang, Yu-Long, Mocuta, Dan, Horiguchi, Naoto, Collaert, Nadine, De Meyer, Kristin
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Volume:
40
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2019.2940819
Date:
November, 2019
File:
PDF, 2.16 MB
english, 2019
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