Phase transformation from rutile to anatase with oxygen ion...

Materials Science in Semiconductor Processing 2020 / 02 Vol. 106

Phase transformation from rutile to anatase with oxygen ion dose in the TiO2 layer formed on a Ti substrate

Medvids, A., Varnagiris, S., Letko, E., Milcius, D., Grase, L., Gaidukovs, S., Mychko, A., Pludons, A., Onufrijevs, P., Mimura, H.
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Volume:
106
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.104776
Date:
February, 2020
File:
PDF, 1.31 MB
english, 2020
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