Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2019 / 11 Vol. 459
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Micro ion beam used to optimize the quality of microstructures based on polydimethylsiloxane
Cutroneo, M., Havranek, V., Malinsky, P., Mackova, A., Torrisi, A., Flaks, J., Slepicka, P., Torrisi, L.Volume:
459
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2019.08.033
Date:
November, 2019
File:
PDF, 6.00 MB
english, 2019