Multiscale micro-/nanostructures on single crystalline SiC...

Optics and Lasers in Engineering 2020 / 04 Vol. 127

Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser

Zheng, Jian, Huang, Jiaxu, Xu, Shaolin
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Volume:
127
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2019.105940
Date:
April, 2020
File:
PDF, 4.48 MB
english, 2020
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