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IEEE Transactions on Semiconductor Manufacturing 2019

An Investigation of Field-effect Passivation Layer Characteristics Using Second Harmonic Generation Measurement

Park, Sung-Kun, Lei, Ming, Do, Youngwoong, Choi, Min-Ki, Kim, Jong-Hun
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Year:
2019
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2019.2949003
File:
PDF, 985 KB
english, 2019
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