[Laser Institute of America ICALEO® 2009: 28th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing - Orlando, Florida, USA (November 2–5, 2009)] International Congress on Applications of Lasers & Electro-Optics - Spatial micro-processing of mono-crystallin silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser
Rosowski, Adam, Piili, Heidi, Pawlak, Ryszard, Kujanpää, Veli, Salminen, AnttiYear:
2009
Language:
english
DOI:
10.2351/1.5061671
File:
PDF, 3.18 MB
english, 2009