Ion beam induced transient amorphous nucleation in silicon

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2020 / 01 Vol. 462

Ion beam induced transient amorphous nucleation in silicon

Spinella, Corrado, Privitera, Stefania M.S., Mio, Antonio Massimiliano, Rimini, Emanuele
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Volume:
462
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2019.11.009
Date:
January, 2020
File:
PDF, 1.82 MB
english, 2020
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