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[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Analysis of submicron defects using an SEM-Auger defect review tool
Childs, Kenton D., Watson, David G., Paul, Dennis F., Clough, Stephen P.Year:
1998
Language:
english
DOI:
10.1063/1.56922
File:
PDF, 675 KB
english, 1998