Selective Area Growth (SAG) and Epitaxial Lateral Overgrowth (ELO) of GaN using Tungsten Mask
Kawaguchi, Yasutoshi, Nambu, Shingo, Sone, Hiroki, Yamaguchi, Masahito, Miyake, Hideto, Hiramatsu, Kazumasa, Sawaki, Nobuhiko, Iyechika, Yasushi, Maeda, TakayoshiVolume:
4
Year:
1999
Language:
english
Journal:
MRS Internet Journal of Nitride Semiconductor Research
DOI:
10.1557/s1092578300002866
File:
PDF, 208 KB
english, 1999