Hybrid Shape Memory Alloy-Based Nanomechanical Resonators...

Hybrid Shape Memory Alloy-Based Nanomechanical Resonators for Ultrathin Film Elastic Properties Determination and Heavy Mass Spectrometry

Stachiv,, Gan,
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Volume:
12
Language:
english
Journal:
Materials
DOI:
10.3390/ma12213593
Date:
October, 2019
File:
PDF, 3.33 MB
english, 2019
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