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Stress evolution in AlN growth on nano-patterned sapphire substrates
Xie, Nan, Xu, Fujun, Wang, Jiaming, Sun, Yuanhao, Liu, Baiyin, Zhang, Na, Lang, Jing, Fang, Xuzhou, Ge, Weikun, Qin, Zhixin, Kang, Xiangning, Yang, Xuelin, WANG, Xinqiang, Shen, BoLanguage:
english
Journal:
Applied Physics Express
DOI:
10.7567/1882-0786/ab582c
Date:
November, 2019
File:
PDF, 525 KB
english, 2019