High crystalline aluminum nitride via highly enhanced adatom diffusion driven by point defect complex
Lee, Moonsang, Yang, Mino, Lee, Hae-Yong, Uk Lee, Hyun, Kim, Heejin, Park, SungsooLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.144615
Date:
November, 2019
File:
PDF, 4.41 MB
english, 2019