[IEEE 2019 Compound Semiconductor Week (CSW) - Nara, Japan (2019.5.19-2019.5.23)] 2019 Compound Semiconductor Week (CSW) - Growth of Ga 2 O 3 Regular Column Structures by Halide Vapour Phase Epitaxy: $\alpha$- and $\varepsilon$-phase Relation
Nikolaev, V.I., Pechnikov, A.I., Nikolaev, V.V., Sheglov, M.P., Chikiryaka, A.V., Stepanov, S.I.Year:
2019
Language:
english
DOI:
10.1109/ICIPRM.2019.8819271
File:
PDF, 702 KB
english, 2019