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Vertical Sandwich Gate-All-Around Field-Effect Transistors with Self-Aligned High-k Metal Gates and Small Effective-Gate-Length Variation
Yin, Xiaogen, Xie, L., Ai, X.Z., Zhang, Y.B., Jia, K.P., Wu, Z.H., Ma, X.L., Zhang, Q.Z., Mao, S.J., Xiang, J.J., Gao, J.F., Zhu, Huilong, He, X.B., Bai, G.B., Lu, Y.H., Zhou, N., Kong, Z.Z., Zhang, YYear:
2019
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2019.2954537
File:
PDF, 1.19 MB
english, 2019