Sputter deposition and thermal evaporation of Li...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2019 / 12 Vol. 37; Iss. 6

Sputter deposition and thermal evaporation of Li 2 O, Li 2 S, and Li 2 Se films

Lorger, Simon, Fischer, Dieter, Usiskin, Robert, Maier, Joachim
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5123439
Date:
December, 2019
File:
PDF, 4.73 MB
english, 2019
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