Texture and Stress Evolution in HfN Films Sputter-Deposited at Oblique Angles
Abadias, Grégory, Anğay, Fırat, Mareus, Rubenson, Mastail, CédricVolume:
9
Journal:
Coatings
DOI:
10.3390/coatings9110712
Date:
October, 2019
File:
PDF, 3.93 MB
2019