Effect of heat treatment on microstructures of magnetron...

Diamond and Related Materials 2019 / 12 Vol. 100

Effect of heat treatment on microstructures of magnetron sputtered amorphous carbon films

Yang, Li, Wang, Xiaofeng, Zou, Lihua, Ruan, Fangtao, Ni, Qingqing
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Volume:
100
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2019.107572
Date:
December, 2019
File:
PDF, 2.29 MB
2019
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