A 10 MHz thin-film piezoelectric-on-silicon MEMS resonator...

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Japanese Journal of Applied Physics 2019 / 11

A 10 MHz thin-film piezoelectric-on-silicon MEMS resonator with T-shaped tethers for Q enhancement

Zhang, Yi, Bao, Jing-Fu, Zhou, Xin, Wu, Zhao-Hui, Bao, Fei-Hong, Zhang, Xiao-Sheng
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Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab58b2
Date:
November, 2019
File:
PDF, 1.26 MB
english, 2019
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