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Nanometer-Scale Defect Detection Using Polarized Light || Interaction of Light and Matter
Dahoo, Pierre Richard, Pougnet, Philippe, El Hami, AbdelkhalakVolume:
10.1002/97
Year:
2016
Language:
english
DOI:
10.1002/9781119329633.ch5
File:
PDF, 924 KB
english, 2016