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The Influence of Low Temperature Pre-Annealing on the Defect Removal and the Reduction of Junction Depth in Excimer Laser Annealing
Baek, Sungkweon, Jang, Taesung, Hwang, HyunsangVolume:
717
Year:
2002
Journal:
MRS Proceedings
DOI:
10.1557/PROC-717-C1.12
File:
PDF, 177 KB
2002