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A novel surface polishing method and its fundamental performance in ultra-fine polishing of wafer
Cao, Jianguo, Li, Jianyong, Nie, Meng, Zhu, Pengzhe, Zhao, Chaoyue, Zhang, Jingjing, Xuan, Tong, Xu, Jinhuan, Li, BaozhenJournal:
The International Journal of Advanced Manufacturing Technology
DOI:
10.1007/s00170-019-04473-9
Date:
November, 2019
File:
PDF, 5.82 MB
2019