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Applied Nanoscience 2019 / 11

Design of composite abrasives and substrate materials for chemical mechanical polishing applications

Meng, Fanning, Zhang, Zhenyu, Gao, Peili, Liu, Tingting, Boyjoo, Yash, Guo, Dongming
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Journal:
Applied Nanoscience
DOI:
10.1007/s13204-019-01211-1
Date:
November, 2019
File:
PDF, 6.19 MB
2019
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