Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction
Matsushita, Akio, Fujimori, Naoji, Tsuchida, Yuki, Ohtani, Noboru, Dojima, Daichi, Koide, Kazunori, Kaneko, Tadaaki, Shikata, ShinichiJournal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2019.107558
Date:
October, 2019
File:
PDF, 7.45 MB
2019
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