Flexible nozzle based liquid metal direct writing system...

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Microsystem Technologies 2019 / 11

Flexible nozzle based liquid metal direct writing system assisted in patterned silicon nanowires

Pei, Zhichao, Rong, Weibin, Wang, Lefeng, Zhang, Shiyu, Zhao, Xiangjin, Zou, Tao, Sun, Lining
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-019-04659-x
Date:
November, 2019
File:
PDF, 1.89 MB
english, 2019
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