Design of a novel 3D tip-based nanofabrication system with...

International Journal of Mechanical Sciences 2020 / 03 Vol. 169

Design of a novel 3D tip-based nanofabrication system with high precision depth control capability

Tian, Yanling, Lu, Kangkang, Wang, Fujun, Guo, Zhiyong, Zhou, Chongkai, Liang, Cunman, Yuan, Yanjie, Zhang, Dawei
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Volume:
169
Language:
english
Journal:
International Journal of Mechanical Sciences
DOI:
10.1016/j.ijmecsci.2019.105328
Date:
March, 2020
File:
PDF, 4.01 MB
english, 2020
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