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Polishing behavior of PS/SiO 2 Core-Shell nanoparticles with different shell thickness on fused silica Chemical Mechanical Polishing
Zhang, Xin, Pan, Guoshun, Wang, Weiqi, Guo, DanVolume:
563
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/563/2/022048
Date:
August, 2019
File:
PDF, 805 KB
2019