Fast and scalable phase change materials Ti–Sb–Te deposited by plasma-enhanced atomic layer deposition
Wang, Hao, Song, Sannian, Song, Zhitang, Zhou, Zhiguo, Yao, Dongning, Lv, ShilongLanguage:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-019-02605-1
Date:
November, 2019
File:
PDF, 1.05 MB
english, 2019