Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching
Zhou, Tianfeng, Xu, Ruzhen, Ruan, Benshuai, He, Yupeng, Liang, Zhiqiang, Wang, XibinLanguage:
english
Journal:
Journal of Materials Processing Technology
DOI:
10.1016/j.jmatprotec.2019.116510
Date:
November, 2019
File:
PDF, 4.55 MB
english, 2019