Pyrolytic carbon resonators for micromechanical thermal...

Microsystems & Nanoengineering 2019 / 12 Vol. 5; Iss. 1

Pyrolytic carbon resonators for micromechanical thermal analysis

Nguyen, Long Quang, Larsen, Peter Emil, Larsen, Tom, Goswami, Sanjukta Bose, Villanueva, Luis Guillermo, Boisen, Anja, Keller, Stephan Sylvest
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Volume:
5
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-019-0094-x
Date:
December, 2019
File:
PDF, 1.88 MB
2019
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