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Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-Optics
Chen, Ssu-Han, Michael, Aron, Kwok, Chee YeeVolume:
28
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2935007
Date:
October, 2019
File:
PDF, 3.13 MB
2019