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Volatile Etch Species Produced During Thermal Al 2 O 3 Atomic Layer Etching
Clancey, Joel, Cavanagh, Andrew S., Smith, James E.T., Sharma, Sandeep, George, Steven M.Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.9b06104
Date:
November, 2019
File:
PDF, 2.94 MB
english, 2019