Radio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α-SiN x on Photonic Crystal—Laser Diodes for Facet Passivation
Wang, Yuancheng, Qu, Hongwei, Wang, Yufei, Dong, Fengxin, Chen, Zhonghao, Zheng, WanhuaLanguage:
english
Journal:
ACS Omega
DOI:
10.1021/acsomega.9b02452
Date:
November, 2019
File:
PDF, 2.28 MB
english, 2019