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Role of Capping Material and GaN Polarity on Mg Ion Implantation Activation

Jacobs, Alan G., Feigelson, Boris N., Hite, Jennifer K., Gorsak, Cameron A., Luna, Lunet E., Anderson, Travis J., Kub, Francis J.
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Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201900789
Date:
November, 2019
File:
PDF, 572 KB
english, 2019
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