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Design and characterization of MEMS-based flow-rate and flow-direction microsensor
Chia-Yen Lee, Chih-Yung Wen, Hui-Hsiung Hou, Ruey-Jen Yang, Chien-Hsiung Tsai, Lung-Ming FuVolume:
6
Language:
english
Pages:
9
DOI:
10.1007/s10404-008-0381-6
Date:
March, 2009
File:
PDF, 550 KB
english, 2009