Fabrication of fluidic chips with 1-D nanochannels on PMMA substrates by photoresist-free UV-lithography and UV-assisted low-temperature bonding
Xianqiao Hu, Qiaohong He, Xiangbo Zhang, Hengwu ChenVolume:
10
Language:
english
Pages:
10
DOI:
10.1007/s10404-010-0753-6
Date:
June, 2011
File:
PDF, 607 KB
english, 2011