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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - The Effects of Preheating in Millisecond Anneals on Dopant Activation in Silicon
Timans, Paul, Pfahler, Christian, Hagedorn, Markus, Cosceev, Alexandr, Zwissler, ManuelaYear:
2018
DOI:
10.1109/iit.2018.8807969
File:
PDF, 498 KB
2018