Hafnia and alumina stacks as UTBOXs in silicon-on insulator
Popov, V.P., Antonov, V.A., Gutakovskiy, A.K., Tyschenko, I.E., Vdovin, V.I., Miakonkikh, A.V., Rudenko, K.V.Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2019.107734
Date:
November, 2019
File:
PDF, 1.16 MB
english, 2019