Development of convolutional neural network based Gaussian...

Control Engineering Practice 2020 / 03 Vol. 96

Development of convolutional neural network based Gaussian process regression to construct a novel probabilistic virtual metrology in multi-stage semiconductor processes

Wu, Xiaofei, Chen, Junghui, Xie, Lei, Chan, Lester Lik Teck, Chen, Chun-I
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Volume:
96
Language:
english
Journal:
Control Engineering Practice
DOI:
10.1016/j.conengprac.2019.104262
Date:
March, 2020
File:
PDF, 2.26 MB
english, 2020
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