Edgeless silicon sensors fabricated without support wafer

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2020 / 02 Vol. 953

Edgeless silicon sensors fabricated without support wafer

Koybasi, Ozhan, Zhang, Jiaguo, Kok, Angela, Summanwar, Anand, Povoli, Marco, Breivik, Lars, Bergamaschi, Anna, Schmitt, Bernd
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Volume:
953
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
DOI:
10.1016/j.nima.2019.163176
Date:
February, 2020
File:
PDF, 4.65 MB
english, 2020
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